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In the article several examples of surface processing using plasma jet machining are presented.

15, D‐04318, Leipzig, GermanyLeibniz‐Institute of Surface Modification, Permoserstr. By continuing to browse this site, you agree to its use of cookies as described in our I have read and accept the Wiley Online Library Terms and Conditions of UseAn investigation on effectiveness of temperature treatment for fluorine‐based reactive plasma jet machining of N‐BK7®, Development of a model for ultra‐precise surface machining of N‐BK7® using microwave‐driven reactive plasma jet machining, Investigation of the formation mechanism of the fluorocarbon film in CF4 plasma processing of fused silica, The Influence of Cold Atmospheric Plasma Irradiation on the Adhesive Bond Strength in Non-Demineralized and Demineralized Human Dentin: An In Vitro Study, 2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018 IEEE Micro Electro Mechanical Systems (MEMS), Low temperature atmospheric microplasma jet array for uniform treatment of polymer surface for flexible electronics, Optimization of micropipette fabrication by laser micromachining for application in an ultrafine atmospheric pressure plasma jet using response surface methodology, Linear chirped slope profile for spatial calibration in slope measuring deflectometry, Development of array-type atmospheric-pressure RF plasma generator with electric on–off control for high-throughput numerically controlled processes, Modeling study on the surface morphology evolution during removing the optics surface/subsurface damage using atmospheric pressure plasma processing, Ultraprecision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies, Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine‐Based Plasma Jet Process, New freeform manufacturing chains based on atmospheric plasma jet machining, Journal of the European Optical Society: Rapid Publications, Etching of silicon surfaces using atmospheric plasma jets, Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies,

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15, D‐04318, Leipzig, GermanyLeibniz‐Institute of Surface Modification, Permoserstr.

Corresponding Author.

In particular, the ion beam processing of aluminium as a material for the production of optical mirrors is investigated and methods for shape correction and smoothing of complex shaped surfaces are developed.

Thomas Arnold Stiftungsprofessor für Ultrapräzisionsbearbeitung von Oberflächen mit Ionen und Plasmen Institut für Fertigungstechnik Technische Universität Dresden 01062 Dresden Email: thomas.arnold@iom-leipzig.de Tel: +49 (0)341 235 3120 Mobile: +49 (0)1520 9685583

Using the dwell‐time algorithm for deterministic surface machining by superposition of the local removal function of the plasma tool an advanced process simulation is necessary.

Leibniz‐Institut für Oberflächenmodifizierung (IOM), Permoserstr. Correspondence Faezeh Kazemi, Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstraße 15, 04318 Leipzig, Germany.

Second order thermal effects due to inhomogeneous heating caused by the part geometry and the tool path can be managed by a sophisticated calculation of the surface temperature evolution during machining based on the Finite Element Method (FEM).